| XY轴的行程范围 | 50 mm x 50 mm *高达 120 mm x 75 mm |
| XY轴分辨率(编码器步长) | 2.5 nm (10 nm at optical axis) |
| XY轴的RMS重复精度 | < 200 nm |
| XY轴*大速度(取决于丝杆节距) | 0.635 mm/sec |
| 具有可选压电顶板的Z轴分辨率 | 2.2 nm with 16 bit DAC 1.1 nm with 17 bit DAC |
| 具有可选压电顶板的Z轴重复率 | +/- 2 nm |
| 具有可选压电顶板的Z轴*大速度 | ~ 10 ms for most moves |
| 推荐的*大负荷 |
|
| 丝杆选择 | 旋转编码器的分辨率 | *大速度 |
| 25.40 mm (极粗) | 88 nm | 28 mm/sec |
| 12.70 mm (超粗) | 44 nm | 14 mm/sec |
| 6.35 mm (标准) | 22 nm | 7 mm/sec |
| 1.59 mm (细) | 5.5 nm | 1.75 mm/sec |
| 0.635 mm (极细) | 2.2 nm | 0.7 mm/sec |
电控显微镜载物台-100x100mm/0.05um
电动显微镜载物台-75x50mm/0.05um
XYZ显微镜自动载物台-120x110mm/700nm/5kg
蔡司显微镜载物台-250x75mm/700nm/5kg
徕卡显微镜载物台-250x75mm/700nm/5kg
大行程超薄显微镜平移台-250x75mm/700nm/5kg
三维自动显微镜载物台-120x110mm/700nm/5kg
XY显微镜自动载物台-120x75mm/700nm/5kg
自动显微镜XYZ位移台
电控XYZ显微镜位移台
自动模块化显微镜
