Orientation | Diameter | Dopant | Min. Resistivity |
Max. Resistivity |
Flat Spec |
Thickness (microns) |
Wafer Quantity |
Cz | <100> | 150.0mm | Boron | >1 | 2 | 400±50 | |
Cz | <100> | 150.0mm | Boron | >1 | 2 | 450±25 | |
Cz | <100> | 150.0mm | Boron | >1 | 2 | 500±25 | |
Fz | <111> | 150.0mm | Undoped | >8,000 | 1 | 600±25 | |
Grow Method |
Orientation | Diameter | Dopant | Min. Resistivity |
Max. Resistivity |
Flat Spec |
Thickness (microns) |
Cz | <100> | 150.0mm | Phosphorous | >1 | 1 | 675±25 | |
Cz | <100> | 150.0mm | Phosphorous | >1 | 1 | 675±25 | |
Cz | <100> | 150.0mm | Phosphorous | >1 | 1 | 675±25 | |
Cz | <100> | 150.0mm | Phosphorous | >1 | 1 | 675±25 | |
Cz | <100> | 150.0mm | Phosphorous | >1 | 1 | 675±25 | |
Grow Method |
Orientation | Diameter | Dopant | Min. Resistivity |
Max. Resistivity |
Flat Spec |
Thickness (microns) |
Cz | <100> | 150.0mm | Phosphorous | >1 | 1 | 675±25 | |
Cz | <100> | 150.0mm | Phosphorous | >1 | 1 | 675±25 | |
Cz | <100> | 150.0mm | Phosphorous | >1 | 1 | 675±25 | |
Cz | <100> | 150.0mm | Phosphorous | >20 | Notch | 675±25 | |
Cz | <100> | 150.0mm | Boron | 0.001 | 0.005 | 1 | 2000±25 |
Orientation | Diameter | Dopant | Min. Resistivity |
Max. Resistivity |
Cz | <111> | 100.0mm | Phosphorous | 1 |
Cz | <111> | 100.0mm | Phosphorous | 1 |
Cz | <100> | 100.0mm | Boron | 0.0006 |
Grow Method |
Orientation | Diameter | Dopant | Min. Resistivity |
Cz | <100> | 100.0mm | N Type | >1 |
Cz | <100> | 100.0mm | Phosphorous | 1 |
Cz | <100> | 100.0mm | Phosphorous | 1 |
Cz | <100> | 100.0mm | Phosphorous | 1 |
Cz | <100> | 100.0mm | Phosphorous | 1 |
Grow Method |
Orientation | Diameter | Dopant | Min. Resistivity |
Cz | <100> | 100.0mm | Phosphorous | 1 |
Cz | <100> | 100.0mm | Boron | >1 |
Cz | <100> | 100.0mm | Boron | >1 |
Cz | <100> | 100.0mm | Boron | >1 |
Cz | <100> | 100.0mm | Boron | >1 |
Grow Method |
Orientation | Diameter | Dopant | Min. Resistivity |
Cz | <100> | 100.0mm | Boron | 1 |
Cz | <100> | 100.0mm | Boron | 1 |
Cz | <100> | 100.0mm | Boron | 1 |
Cz | <100> | 100.0mm | Boron | 1 |
Cz | <100> | 100.0mm | Boron | 0.0006 |